Optical Design Issues for Soft-X-Ray Projection Lithography
W.C. Sweatt, D.A. Tichenor, G.D. Kubiak, W.W. Chow, P.D. Rockett, R.E. Olson, T.E. Jewell, O.R. Wood, D.L. Windt, J.E. Bjorkholm, M.D. Himel, and A.A. MacDowell
PD.1 Optical Design for Photonics (ODP) 1993 View: PDF