Fully integrated nano-opto-electro-mechanical wavelength and displacement sensor
Ž. Zobenica, R.W. van der Heijden, M. Petruzzella, F. Pagliano, R. Leijssen, T. Xia, L. Midolo, M. Cotrufo, Y.-J. Cho, F.W.M. van Otten, E. Verhagen, and A. Fiore
SeW2E.4 Optical Sensors (Sensors) 2016 View: PDF